SYE4006 - Semiconductor Manufacturing and Process Control | ||||||||||||
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| * The offering term is subject to change without prior notice | ||||||||||||
Course Aims | ||||||||||||
The aim of this course is to provide students with a basic understanding of the approaches and techniques for semiconductor manufacturing and process control. The course will provide an overview of the critical unit processes in semiconductor manufacturing and the integration of these unit processes into sequences for fabricating and packaging ICs. The course will introduce various sensor metrology and methods of monitoring IC fabrication processes, and various statistical modelling techniques including the most recent artificial intelligence (AI) methods. Advanced process control will be introduced including univariate and multivariate run-by-run control, and intelligent supervisory control. | ||||||||||||
Assessment (Indicative only, please check the detailed course information) | ||||||||||||
Continuous Assessment: 40% | ||||||||||||
Examination: 60% | ||||||||||||
Examination Duration: 2 hours | ||||||||||||
For a student to pass the course, at least 30% of the maximum mark for the examination should be obtained. | ||||||||||||
Detailed Course Information | ||||||||||||
| SYE4006.pdf | ||||||||||||
